Oxygen partial-pressure control unit and method of gas supply

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Dec 6, 2011
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Mar 18, 2010
app pub date
Dec 5, 2006
filing date
Dec 5, 2006

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Abstract

is caused to circulate along the circulation circuit, and the purified gas produced by the gas purification section is stored in the tank.

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Patent Owner	Address
CANON MACHINERY INC	SHIGA PREFECTURE JAPAN SHIGA

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C01B:NON-METALLIC ELEMENTS; COMPOUNDS THEREOF

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Inventor Name	Address	# of filed Patents	Total Citations
Iwasaki, Ryusuke	Kusatsu, JP	2	5
Matsushita, Haruhiko	Kusatsu, JP	3	15
Nagasawa, Toru	Kusatsu, JP	31	144
Nishimura, Hiroshi	Kusatsu, JP	200	3180

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Oxygen partial-pressure control unit and method of gas supply

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United States of America Patent

12517615

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PATENT NO	8070852
APP PUB NO	20100065440A1
SERIAL NO	12517615
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 06, 2011	US,8070852,B2 US8070852B2	GRANTED PATENT AS SECOND PUBLICATION
March 18, 2010	US,20100065440,A1 US20100065440A1	FIRST PUBLISHED PATENT APPLICATION

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