Spiral pumping stage and vacuum pump incorporating such pumping stage
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United States of America Patent
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Dec 6, 2011
Grant Date -
Jun 24, 2010
app pub date -
Dec 24, 2008
filing date -
Dec 24, 2008
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Abstract
A molecular spiral-type vacuum pumping stage comprises a smooth surfaces rotor disk cooperating with a stator body. The stator body comprises a plurality of spiral channels on at least one surface facing the rotor disk. The cross-section area (σ) of these channels are reduced from the center to the outer periphery of the stator body so that the condition is satisfied according to which the internal channel speed, i.e. the product of the channel cross-section area and half the rotor velocity normal to the aforesaid area, is constant throughout the channels. Due to this arrangement, it is possible to avoid the risk of internal compression or re-expansions, this limiting the power losses. The present invention also refers to a vacuum pump comprising at least one pumping stage as described above.
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