Atomic force microscope apparatus
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United States of America Patent
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Nov 29, 2011
Grant Date -
May 6, 2010
app pub date -
Mar 4, 2008
filing date -
Mar 5, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An object of the present invention is to provide an atomic force microscope apparatus allowing tracking errors to be made as close to zero as possible to reduce images obtained through high-speed scanning from being degraded. To accomplish the object of the present invention, the present invention provides an atomic force microscope apparatus imaging a surface topography of a sample in a contact mode, the apparatus including a cantilever having a probe interacting with the sample surface via an atomic force and being subjected to a deflection by the atomic force, laser light provision means for allowing first laser light to enter the cantilever, light detection means, a controller estimating the surface topography of the sample surface, and data storage means for recording the estimated surface topography.
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