Multi-gas flow device

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United States of America Patent

PATENT NO 8068999
APP PUB NO 20100030388A1
SERIAL NO

12578276

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Abstract

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A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.

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Patent Owner(s)

Patent OwnerAddress
BROOKS INSTRUMENT LLCHATFIELD PA 19440

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lull, John M Fullerton, US 19 779
Valentine, William S Irvine, US 20 393
Wang, Chiun Cypress, US 23 516

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