Polishing pad
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United States of America Patent
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Nov 29, 2011
Grant Date -
Aug 12, 2010
app pub date -
Aug 28, 2008
filing date -
Sep 3, 2007
priority date (Note) -
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Abstract
A polishing pad includes polishing elements interdigitated with one another over a surface of the polishing pad. Each of the polishing elements is secured so as to restrict lateral movement thereof with respect to others of the polishing elements, but remains moveable in an axis normal to a polishing surface of the polishing elements. Different densities of the polishing elements may be positioned within different areas of the surface of the polishing pad.
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