Optical wave interference measuring apparatus
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United States of America Patent
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Nov 15, 2011
Grant Date -
Apr 15, 2010
app pub date -
Oct 14, 2009
filing date -
Oct 15, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.
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