Method and device for moving an element to be driven using an actuating element formed by etching in a semiconductor material
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United States of America Patent
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Nov 15, 2011
Grant Date -
Apr 16, 2009
app pub date -
Mar 16, 2006
filing date -
Mar 18, 2005
priority date (Note) -
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Abstract
The invention concerns an element to be driven, a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to move the driving element so that it drives the element to be driven in step-by-step displacement, the driving element and the actuating element being formed by etching in a semiconductor material wafer. The invention is characterized in that it comprises elastic prestressing means for maintaining the driving element in contact with the element to be driven.
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