Thin film transistor, display device, including the same, and associated methods
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United States of America Patent
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Nov 15, 2011
Grant Date -
Oct 8, 2009
app pub date -
Apr 1, 2009
filing date -
Apr 3, 2008
priority date (Note) -
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Abstract
A thin film transistor (TFT), including a substrate, a gate electrode on the substrate, an oxide semiconductor layer including a channel region, a source region, and a drain region, a gate insulating layer between the gate electrode and the oxide semiconductor layer, and source and drain electrodes in contact with the source and drain regions of the oxide semiconductor layer, respectively, wherein the oxide semiconductor layer has a GaInZnO (GIZO) bilayer structure including a lower layer and an upper layer, and the upper layer has a different indium (In) concentration than the lower layer.
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