Well-aligned, high aspect-ratio, high-density silicon nanowires and methods of making the same

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United States of America Patent

PATENT NO 8044379
APP PUB NO 20100065819A1
SERIAL NO

12311567

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Abstract

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A method of producing silicon nanowires includes providing a substrate in the form of a doped material; formulating an etching solution; and applying an appropriate current density for an appropriate length of time. Related structures and devices composed at least in part from silicon nanowires are also described.

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Patent Owner(s)

Patent OwnerAddress
HITACHI CHEMICAL CO LTDJAPAN TOKYO CHIYODA MARUNOUCHI YIDINGMU 9 NO 2
HITACHI CHEMICAL RESEARCH CENTER INC1003 HEALTH SCIENCES ROAD IRVINE CA 92617

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wu, Yongxian Wayne, US 12 439

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