Micro-column with simple structure
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United States of America Patent
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Oct 25, 2011
Grant Date -
Aug 28, 2008
app pub date -
May 29, 2006
filing date -
Jun 3, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.
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