Scanning probe apparatus
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United States of America Patent
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Oct 11, 2011
Grant Date -
Sep 17, 2009
app pub date -
May 29, 2009
filing date -
Dec 22, 2005
priority date (Note) -
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Abstract
In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.
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