Method of fabricating structures based on nanoparticles
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United States of America Patent
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Oct 4, 2011
Grant Date -
Mar 26, 2009
app pub date -
Jun 6, 2008
filing date -
Jun 8, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This publication discloses a method for creating nanoscale formations. According to the method, a filler matrix and first nanoparticles embedded in the filler matrix, and two conductive electrodes are superimposed on the insulating material layer. According to the invention, a voltage is applied between the conductive electrodes, a filler matrix is used and first nanoparticles have substantially different electrical properties in order to induce self-organized localized contact creation when said voltage is applied. Potential applications of the invention include e.g. parallel-plate capacitor structures based on metal-oxide nanoparticles, such as memory cells, and high-permittivity/tunable capacitors.
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Patent Citation Ranking
- 7 Citation Count
- H01L Class
- 3.01 % this patent is cited more than
- 14 Age
