Vacuum transfer apparatus and method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 4, 2011
Grant Date -
Jan 29, 2009
app pub date -
Jun 6, 2008
filing date -
Jul 25, 2007
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vacuum transfer apparatus including an auxiliary vacuum chamber and a main vacuum chamber is used for transferring an uneven pattern to a disk substrate with a stamper. The auxiliary vacuum chamber is vacuumized or opened to air because the disk substrate is conveyed to and from the vacuum transfer apparatus through the auxiliary vacuum chamber. The disk substrate conveyed to the auxiliary vacuum chamber and then to the main vacuum chamber after the auxiliary vacuum chamber is vacuumized. In the main vacuum chamber, transferring of the uneven pattern with the stamper, curing of UV-curable resin, and removal of the stamper are performed to provide a disk substrate with the uneven pattern. Then, the disk substrate is conveyed from the vacuum transfer apparatus through the auxiliary vacuum chamber. An operation at the auxiliary-vacuum-chamber side and an operation at the main-vacuum-chamber side are performed in parallel.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully