Thin-film resistor with a layer structure and method for manufacturing a thin-film resistor with a layer structure

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United States of America Patent

PATENT NO 8026788
APP PUB NO 20090206982A1
SERIAL NO

12095756

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Abstract

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A thin-film resistor with a layer structure with a Ti layer and a TiN layer is described, wherein a layer thickness of the Ti layer and a layer thickness of the TiN layer are selected such that a resulting temperature coefficient of resistance (TCR) is smaller than 1000 ppm/° C.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E VHANSASTR 27C MUNICH 80686
UNIVERSITAET DUISBURG-ESSENUNIVERSITAETSSTRASSE 2 ESSEN 45141

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Deiters, Heinz Duelmen, DE 1 2
Linnenberg, Susanne Schermbeck, DE 1 2
Nachrodt, Dirk Dulsburg, DE 1 2
Paschen, Uwe Dortmund, DE 3 38
Vogt, Holger Muelheim, DE 17 1071

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