Polymer for organic anti-reflective coating layer and composition including the same
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United States of America Patent
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Sep 27, 2011
Grant Date -
Jan 6, 2011
app pub date -
Jul 14, 2010
filing date -
Dec 22, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A polymer which has siloxane group at a main chain thereof and a composition including the same, for forming an organic anti-reflective coating layer are disclosed. The polymer for forming an organic anti-reflective coating layer is represented by following Formula.is independently hydrogen atom,alcohol group or epoxy group and POSS is a polyhedral oligosilsesquioxane.
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International Classification(s)
- C08J:WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTE....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- C08G:MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN B....
- G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
- C08L:COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08K:USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUB....
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