Generator for flux specific bursts on nano-particles
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United States of America Patent
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Sep 27, 2011
Grant Date -
Jun 19, 2008
app pub date -
Nov 20, 2007
filing date -
Nov 5, 2003
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Abstract
Methods, systems and apparatus for producing a variable, known number of nanoparticles of various materials in an expanding mist in a vacuum or enclosure. The configurations allow for this mist of small particles to be produced in bursts, at repetition rates over a wide range of frequencies. The technique produces an isotropically expanding mist of particles. Direct applications of the invention can be used for the development of high power short wavelength incoherent light sources for applications in EUV lithography (EUVL), advanced microscopy, precision metrology, and other fields.
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