Method of performing an operation with rheological compound

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8025542
APP PUB NO 20080139075A1
SERIAL NO

11748281

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.

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Patent Owner(s)

Patent OwnerAddress
PHOTON DYNAMICS INC17 GREAT OAKS BOULEVARD SAN JOSE CA 95119

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Auyeung, Raymond Alexandria, US 5 90
Bailey, Thomas H San Jose, US 7 65
Birrell, Steven Edward Bozeman, US 2 33
Cable, Alan San Jose, US 2 24
Eldring, Joachim Bozeman, US 11 197
Kwak, Justin Mountain View, US 7 164
Pique, Alberto Crofton, US 20 425
Visser, Joel Manhattan, US 3 111
Young, Lydia J Palo Alto, US 13 697

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