Device for collecting flux of electromagnetic radiation in the extreme ultraviolet
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United States of America Patent
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Sep 20, 2011
Grant Date -
Oct 1, 2009
app pub date -
Apr 4, 2007
filing date -
Apr 7, 2006
priority date (Note) -
Expired
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Abstract
Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source, including a main, first collector stage, with a concave collector mirror placed in front of the source at a distance of greater than 250 mm and pierced by a central hole, and a convex mirror placed behind the concave mirror level with the source and pierced by a central hole, and at least a second collector stage with a concave collector mirror placed in front of the stage and pierced by a central hole and a convex mirror placed behind the concave mirror.
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