Methods of making copper selenium precursor compositions with a targeted copper selenide content and precursor compositions and thin films resulting therefrom
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United States of America Patent
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Sep 20, 2011
Grant Date -
Aug 4, 2011
app pub date -
Feb 4, 2010
filing date -
Feb 4, 2010
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Abstract
Precursor compositions containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semi-conductor applications. Methods of forming the precursor compositions using primary amine solvents and methods of forming the thin films wherein the selection of temperature and duration of heating controls the formation of a targeted species of copper selenide.
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