Developing apparatus and developing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 20, 2011
Grant Date -
Aug 26, 2010
app pub date -
May 5, 2010
filing date -
Jul 15, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully