Lithographic apparatus and device manufacturing method
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United States of America Patent
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Sep 6, 2011
Grant Date -
Aug 21, 2008
app pub date -
Feb 15, 2007
filing date -
Feb 15, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
In a lithographic apparatus, a feedforward transfer function of a control system is determined by: a) iteratively learning a feedforward output signal of the control system by iterative learning control for a given setpoint signal; b) determining a relation between the learned feedforward output signal and the setpoint signal; and c) applying the relation as the feedforward transfer function of the control system. A learned feedforward, which has been learned for one or more specific setpoint signals only, can be adapted to provide a setpoint signal dependent feedforward output signal. The learned feedforward can be made more robust against setpoint variations.
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International Classification(s)
- H03L:AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR S....
- G05B:CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTION....
- G03C:PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES....
- B41F:PRINTING MACHINES OR PRESSES
- G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....
- C11D:DETERGENT COMPOSITIONS
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