Membrane grating for beam steering device and method of fabricating same
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United States of America Patent
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Sep 6, 2011
Grant Date -
Nov 25, 2010
app pub date -
Jul 21, 2010
filing date -
Apr 6, 2007
priority date (Note) -
Expired
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Abstract
A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.
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