Sample decontamination
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United States of America Patent
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Sep 6, 2011
Grant Date -
Dec 24, 2009
app pub date -
May 21, 2009
filing date -
Jun 20, 2008
priority date (Note) -
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Abstract
Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposing the sample to a charged particle beam to cause a plurality of particles to leave the sample and detecting at least some of the plurality of particles. The charged particle beam can include particles having a molecular weight of 40 atomic mass units or less.
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