Method and system for calibrating an X-ray photoelectron spectroscopy measurement
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United States of America Patent
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Sep 6, 2011
Grant Date -
Oct 29, 2009
app pub date -
Apr 27, 2009
filing date -
Apr 29, 2008
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Abstract
A method and a system for calibrating an X-ray photoelectron spectroscopy (XPS) measurement are described. The method includes using an X-ray beam to generate an XPS signal from a sample and normalizing the XPS signal with a measured or estimated flux of the X-ray beam. The system includes an X-ray source for generating an X-ray beam and a sample holder for positioning a sample in a pathway of the X-ray beam. A detector is included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. Also included are a flux detector for determining a measured or estimated flux of the X-ray beam and a computing system for normalizing the XPS signal with the measured or estimated flux of the X-ray beam.
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