Apparatus and methods for ambient air abatement of electronic manufacturing effluent
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United States of America Patent
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Aug 23, 2011
Grant Date -
Mar 26, 2009
app pub date -
Mar 21, 2008
filing date -
Sep 20, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system. The ambient air supply system includes an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.
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