Double side polishing method and apparatus

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United States of America Patent

PATENT NO 8002610
APP PUB NO 20100130111A1
SERIAL NO

12625073

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Abstract

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. Brushes and dressers are used to frequently efficiently process polishing clothes installed on opposite surfaces of the upper and lower rotary surface plates to efficiently and economically achieve high-quality double side polishing.

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO MITSUBISHI SILICON CORPORATION2-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 105-8634

International Classification(s)

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  • 2009 Application Filing Year
  • B24B Class
  • 470 Applications Filed
  • 337 Patents Issued To-Date
  • 71.71 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20092010201120122013201420152016201720182019202020210255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukushima, Tomio Fujiidera, JP 5 53
Horiguchi, Akira Kashiba, JP 27 233
Isobe, Ken Shijyonawate, JP 3 20
Matsumoto, Hiroshi Ikomagun, JP 511 5808
Murata, Kiyohide Nishinomiya, JP 2 17
Takeda, Tsuneo Sourakugun, JP 1 3
Tanaka, Heigo Karatsu, JP 2 17
Uzu, Yoshiaki Ikomagun, JP 2 17

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Patent Citation Ranking

  • 0 Citation Count
  • B24B Class
  • 0 % this patent is cited more than
  • 14 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges19184622919158111341501 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0102030405060708090100110120130140150160170180190200

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