Fluid flow rate sensor and method of operation
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United States of America Patent
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Aug 16, 2011
Grant Date -
Jun 26, 2008
app pub date -
Dec 14, 2007
filing date -
Oct 13, 2004
priority date (Note) -
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Abstract
A probe for a thermo-anemometer-type fluid flow rate sensor is disclosed. The probe comprises a tubular body member having a thermally conductive housing disposed within a fluid passageway and a detection module in the housing. The detection module includes a detection circuit and a heating circuit and is adapted to provide an output that varies in response to a change in temperature. The detection module is made from a ceramic substrate upon which the detection circuit and the heating circuit are deposited.
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