High precision posture control method of X-ray mirror
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United States of America Patent
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Aug 16, 2011
Grant Date -
Jan 7, 2010
app pub date -
Jul 17, 2007
filing date -
Jul 18, 2006
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Abstract
A high precision posture control method for sustaining the posture of an X-ray optical element constantly at 1 μrad or less. A longitudinal condensation mirror and a lateral condensation mirror, each having a condensation plane band consisting of an elliptical reflective surface, are arranged perpendicularly to each other to form a K-B mirror arrangement. Fresnel mirrors are respectively constituted of a pair of planar reflective surfaces formed in the vicinities of the incident side end and the exit side end of the condensation plane band of each condensation mirror. Interference fringe by the Fresnel mirror of each condensation mirror is independently monitored at a position insusceptible to a condensation beam by the condensation plane band, and variation in interference fringe is detected electrically and its detection signal is used as a feedback signal for posture control of each condensation mirror.
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