Optical device with controllable deflection element for vibration compensation
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United States of America Patent
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Aug 16, 2011
Grant Date -
Nov 13, 2008
app pub date -
May 1, 2008
filing date -
May 10, 2007
priority date (Note) -
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Abstract
An optical device, in particular a microscope (1), that includes a beam path in which is arranged at least one deflection element (5, 6a to 6f) for deflecting the beam path, at least one vibration sensor (34) being arranged in or on the optical device; at least one of the deflection elements (5, 6a to 6f) including a mirror having a controllably deformable mirror surface (50); and a control unit (32) being provided that, as a function of the output signal of the vibration sensor (34), applies control to the at least one deflection element (5, 6a to 6f) in order to adjust the mirror surface (50) in such a way that vibrations of the optical device are compensated for by a correspondingly opposite-phase adjustment of the mirror surface (50).
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