Miniaturized switch device
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United States of America Patent
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Aug 16, 2011
Grant Date -
Sep 7, 2006
app pub date -
Mar 3, 2006
filing date -
Mar 4, 2005
priority date (Note) -
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Abstract
The present invention provides a switch suitable for efficient microfabrication. The switch elements are disposed in several layers. Various embodiments provide various switching capabilities and operational characteristics. The switches can be protected by suitable packaging, and can be efficiently fabricated in groups or arrays.
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