Method and apparatus for scribing a line in a thin film using a series of laser pulses
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United States of America Patent
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Aug 16, 2011
Grant Date -
Jun 2, 2011
app pub date -
Nov 24, 2010
filing date -
Nov 30, 2009
priority date (Note) -
Expired
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Abstract
A series of laser pulses in a pulse train, each pulse with a predetermined temporal power shape, scribes a line in a thin film of material on a substrate. The predetermined temporal pulse shape has a fast risetime and fast falltime and a pulse length between 10% power points of less than 10 ns. Scribing a line in the thin film is achieved by placing the series of laser pulse spots on the line to be scribed such that there is some overlapping area between adjacent laser pulse spots along the line. The use of a series of laser pulses with the predetermined pulse shape to scribe a line in the thin film results in a better quality and cleaner scribing process compared to that achieved with a conventional pulse shape.
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