Low pressure sensor device with high accuracy and high sensitivity
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United States of America Patent
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Aug 16, 2011
Grant Date -
Feb 3, 2011
app pub date -
Jul 31, 2009
filing date -
Jul 31, 2009
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Abstract
Pressure non-linearity in a low pressure sensor device formed from a silicon diaphragm with an embedded piezoresistive transducer is reduced by using a shallow boss or thin stiffener on an ultra-thin diaphragm while the pressure sensitivity of the device is increased with corner trenches.
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