Lift pin driving device and a flat panel display manufacturing apparatus having same
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United States of America Patent
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Aug 2, 2011
Grant Date -
May 15, 2008
app pub date -
Oct 18, 2007
filing date -
Nov 10, 2006
priority date (Note) -
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Abstract
A lift pin driving device and a flat panel display (FPD) manufacturing apparatus having the device are provided. The lift pin driving device can precisely move a plurality of lift pins using one motor, thus realizing a simple lift pin driving structure and a simple motor control structure. This allows a space below a chamber body of the manufacturing apparatus to be configured in a variety of ways, thus reducing the cost of equipment and the production cost of products.
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