Stage device for a vacuum chamber
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United States of America Patent
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-
Aug 2, 2011
Grant Date -
Sep 11, 2008
app pub date -
Apr 2, 2003
filing date -
Apr 2, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The disclosure relates to a transfer stage for moving an object in a vacuum chamber in at least a plane of movement, including at least a first and a second rod each having a first and a second end, the first and second rod being connected one to the other with their first ends by a first hinge, the second end of the first rod being provided with a first hinged support and the second end of the second rod being provided with a second hinged support, the first and second hinged supports being roller supports and the first hinge being provided with a short stroke stage for the object. Particularly when using this transfer stage in lithography systems fast and reliable movements are possible.
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