Superconducting magnesium boride thin-film and process for producing the same
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United States of America Patent
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Jul 26, 2011
Grant Date -
Mar 5, 2009
app pub date -
Mar 22, 2006
filing date -
Mar 25, 2005
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Expired
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Abstract
Pa or less, and simultaneously depositing Mg and B on a substrate maintained at a temperature of 200° C. or less so as to grow the film at a growth rate of 0.05 nm/sec or less. It is preferable to supply an Mg vapor and a B vapor into the film forming environment at an Mg/B molar ratio of 1/1 to 12/1.
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