System and method for determining positions of structures on a substrate
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United States of America Patent
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Jul 12, 2011
Grant Date -
Feb 5, 2009
app pub date -
Jul 31, 2008
filing date -
Aug 3, 2007
priority date (Note) -
Expired
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Abstract
A system and a method for determining positions of structures on a substrate are disclosed. The system includes at least one measurement table (20) movable in the X-coordinate direction and in the Y-coordinate direction, a measurement objective (9) and a camera for determining the positions of the structures (3) on the substrate (2). The position of the measurement objective (9) and/or the measurement table (20) may be determined by at least one interferometer (24). The system is surrounded by a housing representing a climatic chamber (50) provided with an active pressure regulation.
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