Compound reference interferometer
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United States of America Patent
Stats
-
Jul 12, 2011
Grant Date -
May 27, 2010
app pub date -
Aug 14, 2009
filing date -
Nov 26, 2008
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Interferometry system are disclosed that include a detector sub-system including a monitor detector, interferometer optics for combining test light from a test object with primary reference light from a first reference interface and secondary reference light from a second reference interface to form a monitor interference pattern on a monitor detector, wherein the first and second reference interfaces are mechanically fixed with respect to each other and the test light, a scanning stage configured to scan an optical path difference (OPD) between the test light and the primary and secondary reference light to the monitor detector while the detector sub-system records the monitor interference pattern for each of a series of OPD increments, and an electronic processor electronically coupled to the detector sub-system and the scanning stage, the electronic processor being configured to determine information about the OPD increments based on the detected monitor interference pattern.
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Patent Citation Ranking
- 10 Citation Count
- G01B Class
- 4.46 % this patent is cited more than
- 14 Age
