Method for producing image contrast by phase shifting in electron optics
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United States of America Patent
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Jul 5, 2011
Grant Date -
Aug 26, 2010
app pub date -
Mar 17, 2009
filing date -
Feb 26, 2009
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Abstract
According to the invention, the image contrast in electron optics can be improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least one anamorphic image, quadrupole fields before and after this image whose extent in the direction of the optical axis is equal to at least twice their focal length, and wherein at least one of the axial rays, by an appropriate choice of the magnification M of the intermediate image, enters the quadrupole field before the at least one anamorphic image at a slope 1/M such that a length of the anamorphic image is achieved at which any aberrations caused are still within a tolerable range. The invention also relates to devices for implementing this method.
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