Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
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United States of America Patent
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Jun 28, 2011
Grant Date -
Dec 16, 2010
app pub date -
Jun 10, 2009
filing date -
Jun 10, 2009
priority date (Note) -
Expired
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Abstract
gas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of the RF power source to the operating impedance of the laser.
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