Spatial light modulator and mirror device
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United States of America Patent
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Jun 28, 2011
Grant Date -
Sep 10, 2009
app pub date -
Mar 30, 2009
filing date -
Nov 1, 2003
priority date (Note) -
Expired
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Abstract
The present invention discloses a spatial light modulator includes a plurality of pixel elements disposed on a substrate. Each of the pixel elements comprises a deflectable micromirror. Specifically, instead of SRAM, the spatial light modulator is implemented with a DRAM in each of the pixel elements. The DRAM in each of the pixel elements has a smaller number of transistors than SRAM. The spatial light modulator can be manufactured with smaller pixel size and circuit configuration with improved withstand voltage. Further improvements can also be achieved for manufactured the spatial light modulator with smaller capacitor with better layout configuration for wire connections and control signal transmissions.
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