Scanning probe microscope having improved optical access
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United States of America Patent
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Jun 14, 2011
Grant Date -
Dec 2, 2010
app pub date -
May 26, 2009
filing date -
May 26, 2009
priority date (Note) -
Expired
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Abstract
A scanning probe microscope and method for using the same are disclosed. The Scanning probe microscope includes a probe mount for connecting a cantilever arm and a probe signal generator. The probe position signal generator generates a position signal indicative of a position of the probe relative to one end of the cantilever arm. The probe position signal generator includes a first light source that directs a light beam at a first reflector positioned on the cantilever arm and a detector that detects a position of the light beam after the light beam has been reflected from the first reflector. A second reflector reflects the light beam after the light beam is reflected from the first reflector and before the light beam enters the detector, the second reflector passing light from a second light source that illuminates the sample.
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