Distortion evaluating apparatus and distortion evaluating method
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United States of America Patent
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Jun 14, 2011
Grant Date -
Jul 2, 2009
app pub date -
Jul 11, 2006
filing date -
Aug 30, 2005
priority date (Note) -
Expired
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Abstract
A distortion evaluating apparatus which can quantitatively evaluate distortion in a measurement object surface is provided. A distortion evaluating apparatus evaluates distortion based on three-dimensional measurement data obtained from a measurement object surface. The apparatus includes a secondary differential component adapted for effecting a secondary differential operation on two-dimensional measurement data of a cross section of the measurement object surface indicative of unevenness therein, thus obtaining curvature data of the cross section, a permissible range setting component adapted for setting a permissible range for the curvature data, based on range of an upper limit value and a lower limit value from a reference value, and a distortion data extracting means component adapted for extracting a portion of the curvature data exceeding the set permissible range as distortion data indicative of the distortion in the cross section.
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