Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates
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United States of America Patent
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Jun 14, 2011
Grant Date -
May 28, 2009
app pub date -
Nov 25, 2008
filing date -
Nov 19, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
Claimed is a sputtering target system comprising a plurality of backing plates to be individually cooled. Each backing plate is provided on its back side with a meandering groove that is closed off by a sealing plate. The sealing plate is welded around its circumference to the backing plate and at the same time is welded to at least one ridge located at a distance from the frame, which separates two grooved sections from one another. The sealing plate thus welded to the backing plate not only closes off the grooves to form a cooling channel, but also is used for reinforcement of the otherwise relatively flat backing plate.
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