Mirror device comprising layered electrode
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United States of America Patent
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Jun 7, 2011
Grant Date -
Mar 18, 2010
app pub date -
Nov 16, 2009
filing date -
Nov 1, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides an image display system implemented with a mirror device comprises a plurality of pixel elements formed on a substrate: wherein: each of said pixel elements comprises a micromirror disposed above and supported on a hinge extended from said substrate; and; a drive electrode disposed on the substrate for receiving signals to control and drive the mirror, wherein the drive electrode comprises an insulation layer, and a first electrode connected to a memory and a second electrode connected to a plate line with the insulation layer disposed between and insulating the first and the second electrode.
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