Deformable mirror device with oscillating states for providing smaller controllable adjustment of light intensity
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United States of America Patent
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Jun 7, 2011
Grant Date -
Aug 14, 2008
app pub date -
Dec 24, 2007
filing date -
Nov 1, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A mirror device including: a mirror arranged on a substrate, supported by a hinge, and arranged substantially parallel to the substrate; a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state; and a drive circuit for applying a voltage to the plurality of address electrodes. The mirror device is controlled such that a voltage can be applied to a corresponding address electrode to deflect the mirror, and oscillation in the oscillating state can be started from a state of the deflected mirror.
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