Thin alignment layers for liquid crystal displays
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United States of America Patent
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Jun 7, 2011
Grant Date -
Mar 15, 2007
app pub date -
Sep 15, 2005
filing date -
Sep 15, 2005
priority date (Note) -
Expired
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Abstract
A method to form alignment layers on a substrate of an LCD is disclosed. The substrate is placed in a vacuum chamber and undergoes a purging process. The purging process heats the substrates and removes water vapor from the vacuum chamber. Specifically, The vacuum chamber is evacuated to a low pressure and refilled with a preheated inert gas. Evacuation of the vacuum chamber and refilling of the vacuum chamber is repeated several times. The alignment layer is then deposited using chemical vapor deposition.
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