Surface profiling apparatus
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United States of America Patent
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May 24, 2011
Grant Date -
Sep 4, 2008
app pub date -
May 6, 2008
filing date -
Mar 14, 2002
priority date (Note) -
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Abstract
Broadband light is directed along sample and reference paths such that light reflected by a sample surface and light reflected by a reference surface interfere. A mover effects relative movement between the sample and reference surfaces along a scan path. A detector senses a series of light intensity values representing interference fringes produced by a sample surface region during the movement. A data processor processes the intensity values as they are received to produce coherence peak position data and, after completion of a measurement operation, uses this coherence peak position data to obtain data indicative of the height of the surface region. The data processor includes a correlator for correlating intensity values with correlation function data to provide correlation data to enable identification of a position of a coherence peak. A surface topography determiner determines a height of a sample surface region from coherence peak position data.
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