Coaxial waveguide microstructure having conductive and insulation materials defining voids therein
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United States of America Patent
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May 24, 2011
Grant Date -
Mar 5, 2009
app pub date -
Jun 20, 2008
filing date -
Mar 4, 2003
priority date (Note) -
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Abstract
Provided are coaxial waveguide microstructures. The microstructures include a substrate and a coaxial waveguide disposed above the substrate. The coaxial waveguide includes: a center conductor; an outer conductor including one or more walls, spaced apart from and disposed around the center conductor; one or more dielectric support members for supporting the center conductor in contact with the center conductor and enclosed within the outer conductor; and a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state. Also provided are methods of forming coaxial waveguide microstructures by a sequential build process and hermetic packages which include a coaxial waveguide microstructure.
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