Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof
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United States of America Patent
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May 17, 2011
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Apr 20, 2006
app pub date -
Oct 18, 2005
filing date -
Oct 18, 2004
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Abstract
Embodiments of the invention provide a magnetic recording medium superior in terms magnetic head flying performance, abrasion resistant reliability and corrosion resistance and a method for manufacturing the same. In one embodiment, method for manufacturing a magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon (DLC) protective film on a nonmagnetic substrate. While the DLC protective film layer to protect the granular magnetic layer of the magnetic recording medium is formed, hydrocarbon gas is mixed with hydrogen gas and a bias voltage is applied to the substrate.
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