X-ray condensing method and its device using phase restoration method
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United States of America Patent
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May 3, 2011
Grant Date -
Jul 22, 2010
app pub date -
Dec 27, 2007
filing date -
Dec 28, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An X-ray condensing method and its device are provided with an X-ray mirror that has a wavefront adjustable function to finely adjust a wavefront of a reflecting X-ray, measure an X-ray intensity distribution in the vicinity of a focus, measure an X-ray intensity distribution in the vicinity of the X-ray mirror or use a known X-ray intensity distribution of an incident X-ray, calculate a complex amplitude distribution at the reflective surface by using a phase restoration method from the X-ray intensity distribution in the vicinity of the focus and the X-ray intensity distribution in the vicinity of the reflective surface, calculate a wavefront aberration of an X-ray condensing optical system from the complex amplitude distribution, and control the reflective surface of the X-ray mirror with the wavefront adjustable function so that the wavefront aberration is minimized.
First Claim
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Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| JP | B2 | JP4814782 | Dec 28, 2006 |
| WO | A1 | WO2008081873 | Dec 27, 2007 |
| EP | B1 | EP2063434 | Dec 27, 2007 |
International Classification(s)
- 2007 Application Filing Year
- G21K Class
- 462 Applications Filed
- 181 Patents Issued To-Date
- 39.18 % Issued To-Date
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- 0 Citation Count
- G21K Class
- 0 % this patent is cited more than
- 14 Age
